Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848232 | Method for Si gap fill by PECVD | Xin Liu, Fei Wang, Abhijit Basu Mallick, Robert Jan Visser | 2023-12-19 |
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Diwakar Kedlaya +7 more | 2023-11-28 |
| 11769666 | Selective deposition of silicon using deposition-treat-etch process | Fei Wang, Abhijit Basu Mallick, Robert Jan Visser | 2023-09-26 |
| 11705335 | Conformal high concentration boron doping of semiconductors | Srinivas Gandikota, Abhijit Basu Mallick, Swaminathan Srinivasan, Susmit Singha Roy, Gaurav Thareja +2 more | 2023-07-18 |
| 11676813 | Doping semiconductor films | Aykut Aydin, Yi Yang, Krishna Nittala, Karthik Janakiraman, Bo Qi +1 more | 2023-06-13 |
| 11640905 | Plasma enhanced deposition of silicon-containing films at low temperature | Aykut Aydin, Karthik Janakiraman | 2023-05-02 |
| 11621400 | Transparent substrate, flexible display substrate and its manufacturing method, and display device | Yuehua Cui | 2023-04-04 |
| 11594415 | PECVD tungsten containing hardmask films and methods of making | Susmit Singha Roy, Pramit Manna, Abhijit Basu Mallick | 2023-02-28 |
| 11562902 | Hydrogen management in plasma deposited films | Diwakar Kedlaya, Karthik Janakiraman, Gautam K. Hemani, Krishna Nittala, Alicia J. Lustgraaf +4 more | 2023-01-24 |