| 11848178 |
Optical absorption sensor for semiconductor processing |
Fang Ruan |
2023-12-19 |
| 11830706 |
Heated pedestal design for improved heat transfer and temperature uniformity |
Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng +7 more |
2023-11-28 |
| 11814716 |
Faceplate having blocked center hole |
Fang Ruan, Prashant Kumar Kulshreshtha, Jiheng Zhao |
2023-11-14 |
| 11810764 |
Faceplate with edge flow control |
Fang Ruan, Prashant Kumar Kulshreshtha, Rajaram Narayanan |
2023-11-07 |
| 11804363 |
Chamber components for gas delivery modulation |
Fang Ruan, Truong Van Nguyen, Mingle Tong, Sherry L. Mings, Venkata Sharat Chandra Parimi |
2023-10-31 |
| 11798820 |
Gas delivery systems and methods |
Fang Ruan, Zubin Huang, Ganesh Balasubramanian, Kaushik Alayavalli, Martin Jay Seamons +3 more |
2023-10-24 |
| 11682544 |
Cover wafer for semiconductor processing chamber |
Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Fang Ruan, Amit Kumar BANSAL |
2023-06-20 |
| 11618949 |
Methods to reduce material surface roughness |
Yi Yang, Krishna Nittala, Karthik Janakiraman, Aykut Aydin |
2023-04-04 |
| 11598004 |
Lid assembly apparatus and methods for substrate processing chambers |
Hanish Kumar Panavalappil Kumarankutty, Prashant A. DESAI, Sumit Agarwal, Vidyadharan Srinivasa Murthy Bangalore, Truong Van Nguyen +1 more |
2023-03-07 |
| 11562902 |
Hydrogen management in plasma deposited films |
Rui Cheng, Karthik Janakiraman, Gautam K. Hemani, Krishna Nittala, Alicia J. Lustgraaf +4 more |
2023-01-24 |
