Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848178 | Optical absorption sensor for semiconductor processing | Diwakar Kedlaya | 2023-12-19 |
| 11814716 | Faceplate having blocked center hole | Prashant Kumar Kulshreshtha, Jiheng Zhao, Diwakar Kedlaya | 2023-11-14 |
| 11810764 | Faceplate with edge flow control | Prashant Kumar Kulshreshtha, Rajaram Narayanan, Diwakar Kedlaya | 2023-11-07 |
| 11804363 | Chamber components for gas delivery modulation | Diwakar Kedlaya, Truong Van Nguyen, Mingle Tong, Sherry L. Mings, Venkata Sharat Chandra Parimi | 2023-10-31 |
| 11798820 | Gas delivery systems and methods | Diwakar Kedlaya, Zubin Huang, Ganesh Balasubramanian, Kaushik Alayavalli, Martin Jay Seamons +3 more | 2023-10-24 |
| 11682544 | Cover wafer for semiconductor processing chamber | Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Diwakar Kedlaya, Amit Kumar BANSAL | 2023-06-20 |
| 11613808 | Clean processes for boron carbon film deposition | Jiheng Zhao, Abdul Aziz Khaja, Prashant Kumar Kulshreshtha | 2023-03-28 |