| 11851759 |
Faceplate having a curved surface |
Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Juan Carlos Rocha-Alvarez +5 more |
2023-12-26 |
| 11827980 |
Isolator apparatus and methods for substrate processing chambers |
Nitin Pathak, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi, Juan Carlos Rocha-Alvarez |
2023-11-28 |
| 11742235 |
Coaxial lift device with dynamic leveling |
Jason M. Schaller, Jeffrey Blahnik |
2023-08-29 |
| 11742185 |
Uniform in situ cleaning and deposition |
Saket Rathi, Tuan Nguyen, Yuxing Zhang, Badri Narayan Ramamurthi, Nitin Pathak +2 more |
2023-08-29 |
| 11697877 |
High temperature face plate for deposition application |
Saket Rathi, Tuan Nguyen |
2023-07-11 |
| 11699577 |
Treatment for high-temperature cleans |
Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Dong-Hyung LEE, Ganesh Balasubramanian +6 more |
2023-07-11 |
| 11682544 |
Cover wafer for semiconductor processing chamber |
Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Diwakar Kedlaya, Fang Ruan |
2023-06-20 |
| 11656366 |
Apparatus, system and method for generalized multi-mode state machine based localization engine and application of same |
Pengluo Wang, Hairuo Zhuang, Xue Li, Venkatesan Nallampatti Ekambaram, Vignesh Sethuraman |
2023-05-23 |
| 11643725 |
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater |
Nitin Pathak, Tuan Nguyen, Badri Narayan Ramamurthi, Thomas Rubio, Juan Carlos Rocha-Alvarez |
2023-05-09 |
| 11613812 |
PECVD process |
Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more |
2023-03-28 |
| 11580475 |
Utilizing artificial intelligence to predict risk and compliance actionable insights, predict remediation incidents, and accelerate a remediation process |
San Retna, Tushant Nayyar, Rithesh Mohan, Rimon Nissan, Jennifer Pham |
2023-02-14 |
| 11574825 |
External substrate system rotation in a semiconductor processing system |
Tuan Nguyen, Juan Carlos Rocha-Alvarez |
2023-02-07 |
| 11550064 |
Apparatus, system and method for providing global localization output and application of same |
Hairuo Zhuang, Venkatesan Nallampatti Ekambaram, Vignesh Sethuraman |
2023-01-10 |
