Issued Patents 2023
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851759 | Faceplate having a curved surface | Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Amit Kumar BANSAL +5 more | 2023-12-26 |
| 11830706 | Heated pedestal design for improved heat transfer and temperature uniformity | Venkata Sharat Chandra Parimi, Zubin Huang, Jian Li, Satish Radhakrishnan, Rui Cheng +7 more | 2023-11-28 |
| 11827980 | Isolator apparatus and methods for substrate processing chambers | Nitin Pathak, Amit Kumar BANSAL, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi | 2023-11-28 |
| 11776835 | Power supply signal conditioning for an electrostatic chuck | Zheng John Ye, Daemian Raj Benjamin Raj, Rana Howlader, Abhigyan Keshri, Sanjay Kamath +6 more | 2023-10-03 |
| 11699602 | Substrate support assemblies and components | Jian Li, Edward P. Hammond, IV, Viren Kalsekar, Vidyadharan Srinivasa Murthy Bangalore | 2023-07-11 |
| 11643725 | Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater | Nitin Pathak, Tuan Nguyen, Amit Kumar BANSAL, Badri Narayan Ramamurthi, Thomas Rubio | 2023-05-09 |
| 11613812 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2023-03-28 |
| 11594440 | Real time bias detection and correction for electrostatic chuck | Jian Li, Dmitry A. Dzilno | 2023-02-28 |
| 11587817 | High temperature bipolar electrostatic chuck | Jian Li, Zheng John Ye, Dmitry A. Dzilno | 2023-02-21 |
| 11574825 | External substrate system rotation in a semiconductor processing system | Tuan Nguyen, Amit Kumar BANSAL | 2023-02-07 |