Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851759 | Faceplate having a curved surface | Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez +5 more | 2023-12-26 |
| 11798803 | Dynamic multi zone flow control for a processing system | Gregory Eugene CHICHKANOFF, Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Abhigyan Keshri +1 more | 2023-10-24 |
| 11776835 | Power supply signal conditioning for an electrostatic chuck | Zheng John Ye, Rana Howlader, Abhigyan Keshri, Sanjay Kamath, Dmitry A. Dzilno +6 more | 2023-10-03 |
| 11570879 | Methods and apparatus for controlling RF parameters at multiple frequencies | Zheng John Ye, Shailendra Srivastava, Nikhil Sudhindrarao Jorapur, Ndanka O. Mukuti, Dmitry A. Dzilno +1 more | 2023-01-31 |