Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776835 | Power supply signal conditioning for an electrostatic chuck | Zheng John Ye, Daemian Raj Benjamin Raj, Rana Howlader, Abhigyan Keshri, Sanjay Kamath +6 more | 2023-10-03 |
| 11699602 | Substrate support assemblies and components | Jian Li, Viren Kalsekar, Vidyadharan Srinivasa Murthy Bangalore, Juan Carlos Rocha-Alvarez | 2023-07-11 |
| 11626853 | RF power delivery architecture with switchable match and frequency tuning | Yury Trachuk, Dmitry A. Dzilno | 2023-04-11 |
| 11569072 | RF grounding configuration for pedestals | Satya THOKACHICHU, Viren Kalsekar, Zheng John Ye, Abdul Aziz Khaja, Vinay Prabhakar | 2023-01-31 |
| 11545376 | Plasma parameters and skew characterization by high speed imaging | Sidharth Bhatia, Bhaskar Kumar, Anup K. Singh, Vivek Shah, Ganesh Balasubramanian | 2023-01-03 |