| 11852410 |
Back-blowing unblocking device for dustproof screen of dryer, dustproof equipment, and dryer |
Hongbing Wang, Guozhi LIU, Xin Wang |
2023-12-26 |
| 11851758 |
Fabrication of a high temperature showerhead |
Sumit Agarwal, Katherine Woo, Shawyon Jafari, Chidambara A. Ramalingam |
2023-12-26 |
| 11830706 |
Heated pedestal design for improved heat transfer and temperature uniformity |
Venkata Sharat Chandra Parimi, Zubin Huang, Satish Radhakrishnan, Rui Cheng, Diwakar Kedlaya +7 more |
2023-11-28 |
| 11808639 |
High-precision temperature demodulation method oriented toward distributed fiber Raman sensor |
Mingjiang Zhang, Jianzhong Zhang, Lijun Qiao, Tao Wang, Yuncai Wang +3 more |
2023-11-07 |
| 11731321 |
Method for preparing microgroove array surface with nearly cylindrical surface based on air molding method |
Weifeng Jin, Xin Ju, Lamei Wang |
2023-08-22 |
| 11699602 |
Substrate support assemblies and components |
Edward P. Hammond, IV, Viren Kalsekar, Vidyadharan Srinivasa Murthy Bangalore, Juan Carlos Rocha-Alvarez |
2023-07-11 |
| 11655144 |
Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method |
Fanlin ZENG, Lamei Wang, Rao Fu, Gang Liu, Jie Luo |
2023-05-23 |
| 11594440 |
Real time bias detection and correction for electrostatic chuck |
Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno |
2023-02-28 |
| 11587817 |
High temperature bipolar electrostatic chuck |
Zheng John Ye, Dmitry A. Dzilno, Juan Carlos Rocha-Alvarez |
2023-02-21 |
| 11584994 |
Pedestal for substrate processing chambers |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more |
2023-02-21 |
| 11573322 |
Laser speed measuring method, control device and laser velocimeter |
Shangmin Sun, Yongming Wang, Yanwei Xu, Weifeng Yu, Yu-Hsiang Hu +1 more |
2023-02-07 |
