Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851758 | Fabrication of a high temperature showerhead | Sumit Agarwal, Katherine Woo, Jian Li, Chidambara A. Ramalingam | 2023-12-26 |
| 11853042 | Part, sensor, and metrology data integration | Garrett H. Sin, Sidharth Bhatia, Katty Marie Lydia Gamon Guyomard, Heng-Cheng Pai, Pramod Nambiar +2 more | 2023-12-26 |
| 11848218 | Semiconductor chamber component cleaning systems | Katty Marie Lydia Gamon Guyomard, Chidambara A. Ramalingam, Palash Joshi, Moin Ahmed Khan, Kirubanandan Naina SHANMUGAM +5 more | 2023-12-19 |