Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11851758 | Fabrication of a high temperature showerhead | Katherine Woo, Shawyon Jafari, Jian Li, Chidambara A. Ramalingam | 2023-12-26 |
| 11819948 | Methods to fabricate chamber component holes using laser drilling | Timothy Joseph Franklin, Joseph F. Sommers | 2023-11-21 |
| 11598004 | Lid assembly apparatus and methods for substrate processing chambers | Hanish Kumar Panavalappil Kumarankutty, Prashant A. DESAI, Diwakar Kedlaya, Vidyadharan Srinivasa Murthy Bangalore, Truong Van Nguyen +1 more | 2023-03-07 |