Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804363 | Chamber components for gas delivery modulation | Fang Ruan, Diwakar Kedlaya, Mingle Tong, Sherry L. Mings, Venkata Sharat Chandra Parimi | 2023-10-31 |
| 11791136 | Deposition radial and edge profile tunability through independent control of TEOS flow | Sanjeev Baluja, Yi Yang, Nattaworn Boss Nunta, Joseph AuBuchon, Tuan Nguyen +1 more | 2023-10-17 |
| 11598004 | Lid assembly apparatus and methods for substrate processing chambers | Hanish Kumar Panavalappil Kumarankutty, Prashant A. DESAI, Diwakar Kedlaya, Sumit Agarwal, Vidyadharan Srinivasa Murthy Bangalore +1 more | 2023-03-07 |