Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804363 | Chamber components for gas delivery modulation | Fang Ruan, Diwakar Kedlaya, Truong Van Nguyen, Sherry L. Mings, Venkata Sharat Chandra Parimi | 2023-10-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804363 | Chamber components for gas delivery modulation | Fang Ruan, Diwakar Kedlaya, Truong Van Nguyen, Sherry L. Mings, Venkata Sharat Chandra Parimi | 2023-10-31 |