Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699602 | Substrate support assemblies and components | Jian Li, Edward P. Hammond, IV, Viren Kalsekar, Juan Carlos Rocha-Alvarez | 2023-07-11 |
| 11598004 | Lid assembly apparatus and methods for substrate processing chambers | Hanish Kumar Panavalappil Kumarankutty, Prashant A. DESAI, Diwakar Kedlaya, Sumit Agarwal, Truong Van Nguyen +1 more | 2023-03-07 |