Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11598004 | Lid assembly apparatus and methods for substrate processing chambers | Hanish Kumar Panavalappil Kumarankutty, Diwakar Kedlaya, Sumit Agarwal, Vidyadharan Srinivasa Murthy Bangalore, Truong Van Nguyen +1 more | 2023-03-07 |