Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11819948 | Methods to fabricate chamber component holes using laser drilling | Sumit Agarwal, Joseph F. Sommers | 2023-11-21 |
| 11587764 | Magnetic housing systems | Srinivas Gandikota, Tza-Jing Gung, Samuel E. Gottheim, Pramit Manna, Eswaranand Venkatasubramanian +3 more | 2023-02-21 |
| 11560626 | Substrate processing chamber | Adam J. Fischbach, Edward Haywood, Abhijit Basu Mallick, Pramit Manna, Carlaton WONG +2 more | 2023-01-24 |
| 11557466 | Tuneable uniformity control utilizing rotational magnetic housing | Samuel E. Gottheim, Abhijit Basu Mallick, Pramit Manna, Eswaranand Venkatasubramanian, Edward Haywood +2 more | 2023-01-17 |