Issued Patents 2023
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842897 | High density carbon films for patterning applications | Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick | 2023-12-12 |
| 11784042 | Carbon hard masks for patterning applications and methods related thereto | Eswaranand Venkatasubramanian, Yang Yang, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick | 2023-10-10 |
| 11721545 | Method of using dual frequency RF power in a process chamber | Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Bhaskar Kumar, Krishna Nittala +2 more | 2023-08-08 |
| 11699585 | Methods of forming hardmasks | Jui-Yuan Hsu, Bhaskar Kumar, Karthik Janakiraman | 2023-07-11 |
| 11676858 | High bias deposition of high quality gapfill | Samuel E. Gottheim, Eswaranand Venkatasubramanian, Abhijit Basu Mallick | 2023-06-13 |
| 11664214 | Methods for producing high-density, nitrogen-doped carbon films for hardmasks and other patterning applications | Jui-Yuan Hsu, Karthik Janakiraman | 2023-05-30 |
| 11664226 | Methods for producing high-density carbon films for hardmasks and other patterning applications | Jui-Yuan Hsu, Karthik Janakiraman | 2023-05-30 |
| 11638374 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Nancy Fung, Eswaranand Venkatasubramanian +2 more | 2023-04-25 |
| 11603591 | Pulsed plasma (DC/RF) deposition of high quality C films for patterning | Eswaranand Venkatasubramanian, Yang Yang, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick | 2023-03-14 |
| 11594415 | PECVD tungsten containing hardmask films and methods of making | Susmit Singha Roy, Rui Cheng, Abhijit Basu Mallick | 2023-02-28 |
| 11587764 | Magnetic housing systems | Srinivas Gandikota, Tza-Jing Gung, Samuel E. Gottheim, Timothy Joseph Franklin, Eswaranand Venkatasubramanian +3 more | 2023-02-21 |
| 11578409 | Low deposition rates for flowable PECVD | Shishi Jiang, Abhijit Basu Mallick | 2023-02-14 |
| 11560626 | Substrate processing chamber | Timothy Joseph Franklin, Adam J. Fischbach, Edward Haywood, Abhijit Basu Mallick, Carlaton WONG +2 more | 2023-01-24 |
| 11557466 | Tuneable uniformity control utilizing rotational magnetic housing | Samuel E. Gottheim, Abhijit Basu Mallick, Eswaranand Venkatasubramanian, Timothy Joseph Franklin, Edward Haywood +2 more | 2023-01-17 |
| 11557478 | In-situ high power implant to relieve stress of a thin film | Eswaranand Venkatasubramanian, Abhijit Basu Mallick, Srinivas Gandikota | 2023-01-17 |