| 11842897 |
High density carbon films for patterning applications |
Eswaranand Venkatasubramanian, Samuel E. Gottheim, Abhijit Basu Mallick |
2023-12-12 |
| 11784042 |
Carbon hard masks for patterning applications and methods related thereto |
Eswaranand Venkatasubramanian, Yang Yang, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick |
2023-10-10 |
| 11721545 |
Method of using dual frequency RF power in a process chamber |
Anup K. Singh, Rick Kustra, Vinayak Vishwanath Hassan, Bhaskar Kumar, Krishna Nittala +2 more |
2023-08-08 |
| 11699585 |
Methods of forming hardmasks |
Jui-Yuan Hsu, Bhaskar Kumar, Karthik Janakiraman |
2023-07-11 |
| 11676858 |
High bias deposition of high quality gapfill |
Samuel E. Gottheim, Eswaranand Venkatasubramanian, Abhijit Basu Mallick |
2023-06-13 |
| 11664214 |
Methods for producing high-density, nitrogen-doped carbon films for hardmasks and other patterning applications |
Jui-Yuan Hsu, Karthik Janakiraman |
2023-05-30 |
| 11664226 |
Methods for producing high-density carbon films for hardmasks and other patterning applications |
Jui-Yuan Hsu, Karthik Janakiraman |
2023-05-30 |
| 11638374 |
Multicolor approach to DRAM STI active cut patterning |
Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Nancy Fung, Eswaranand Venkatasubramanian +2 more |
2023-04-25 |
| 11603591 |
Pulsed plasma (DC/RF) deposition of high quality C films for patterning |
Eswaranand Venkatasubramanian, Yang Yang, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick |
2023-03-14 |
| 11594415 |
PECVD tungsten containing hardmask films and methods of making |
Susmit Singha Roy, Rui Cheng, Abhijit Basu Mallick |
2023-02-28 |
| 11587764 |
Magnetic housing systems |
Srinivas Gandikota, Tza-Jing Gung, Samuel E. Gottheim, Timothy Joseph Franklin, Eswaranand Venkatasubramanian +3 more |
2023-02-21 |
| 11578409 |
Low deposition rates for flowable PECVD |
Shishi Jiang, Abhijit Basu Mallick |
2023-02-14 |
| 11560626 |
Substrate processing chamber |
Timothy Joseph Franklin, Adam J. Fischbach, Edward Haywood, Abhijit Basu Mallick, Carlaton WONG +2 more |
2023-01-24 |
| 11557466 |
Tuneable uniformity control utilizing rotational magnetic housing |
Samuel E. Gottheim, Abhijit Basu Mallick, Eswaranand Venkatasubramanian, Timothy Joseph Franklin, Edward Haywood +2 more |
2023-01-17 |
| 11557478 |
In-situ high power implant to relieve stress of a thin film |
Eswaranand Venkatasubramanian, Abhijit Basu Mallick, Srinivas Gandikota |
2023-01-17 |
