Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776811 | Selective deposition of carbon on photoresist layer for lithography applications | Larry Gao | 2023-10-03 |
| 11658042 | Methods for etching structures and smoothing sidewalls | Gabriela Alva | 2023-05-23 |
| 11658043 | Selective anisotropic metal etch | Jonathan C. Shaw, Priyadarshi Panda, Yongchang Dong, Somaye Rasouli, Gene Lee | 2023-05-23 |
| 11638374 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Takehito Koshizawa, Abhijit Basu Mallick, Pramit Manna, Eswaranand Venkatasubramanian +2 more | 2023-04-25 |