Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791155 | Diffusion barriers for germanium | Huiyuan Wang, Susmit Singha Roy, Bo Qi, Abhijit Basu Mallick, Nitin K. Ingle | 2023-10-17 |
| 11784042 | Carbon hard masks for patterning applications and methods related thereto | Eswaranand Venkatasubramanian, Yang Yang, Pramit Manna, Kartik Ramaswamy, Abhijit Basu Mallick | 2023-10-10 |
| 11781218 | Defect free germanium oxide gap fill | Huiyuan Wang, Susmit Singha Roy, Bo Qi, Abhijit Basu Mallick | 2023-10-10 |
| 11638377 | Self-aligned select gate cut for 3D NAND | — | 2023-04-25 |
| 11638374 | Multicolor approach to DRAM STI active cut patterning | Tejinder Singh, Abhijit Basu Mallick, Pramit Manna, Nancy Fung, Eswaranand Venkatasubramanian +2 more | 2023-04-25 |
| 11603591 | Pulsed plasma (DC/RF) deposition of high quality C films for patterning | Eswaranand Venkatasubramanian, Yang Yang, Pramit Manna, Kartik Ramaswamy, Abhijit Basu Mallick | 2023-03-14 |
| 11545504 | Methods and apparatus for three dimensional NAND structure fabrication | Mukund Srinivasan, Tomohiko Kitajima, Chang-Seok Kang, Sung-Kwan Kang, Gill Yong Lee +1 more | 2023-01-03 |