Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823868 | Hardware switch on main feed line in a radio frequency plasma processing chamber | Yue Guo, Kartik Ramaswamy | 2023-11-21 |
| 11810760 | Apparatus and method of ion current compensation | Yue Guo, Kartik Ramaswamy | 2023-11-07 |
| 11784042 | Carbon hard masks for patterning applications and methods related thereto | Eswaranand Venkatasubramanian, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick | 2023-10-10 |
| 11776788 | Pulsed voltage boost for substrate processing | Yue Guo, Kartik Ramaswamy | 2023-10-03 |
| 11721525 | Sensorless RF impedance matching network | Yue Guo, Kartik Ramaswamy | 2023-08-08 |
| 11651966 | Methods and apparatus for processing a substrate | Kartik Ramaswamy, Kenneth S. Collins, Steven Lane, Gonzalo Monroy, Yue Guo | 2023-05-16 |
| 11609349 | Determining properties of a subterranean formation using an acoustic wave equation with a reflectivity parameterization | Norman Daniel Whitmore, JR., Jaime Ramos-Martinez, Sean Crawley, Alejandro Antonio Valenciano Mavilio, Nizar Chemingui | 2023-03-21 |
| 11603591 | Pulsed plasma (DC/RF) deposition of high quality C films for patterning | Eswaranand Venkatasubramanian, Pramit Manna, Kartik Ramaswamy, Takehito Koshizawa, Abhijit Basu Mallick | 2023-03-14 |