Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814724 | Continuous liner for use in a processing chamber | James D. Carducci, Kartik Ramaswamy | 2023-11-14 |
| 11651966 | Methods and apparatus for processing a substrate | Kartik Ramaswamy, Yang Yang, Steven Lane, Gonzalo Monroy, Yue Guo | 2023-05-16 |
| 11587766 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Shahid Rauf +3 more | 2023-02-21 |