Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 11587766 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Zhigang Chen, James D. Carducci, Kenneth S. Collins, Shahid Rauf +3 more | 2023-02-21 | $24,540,000 |