Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814724 | Continuous liner for use in a processing chamber | Kenneth S. Collins, Kartik Ramaswamy | 2023-11-14 |
| 11670489 | Modular microwave source with embedded ground surface | Joseph AuBuchon, Larry D. Elizaga, Richard Fovell, Philip Allan Kraus, Thai Cheng Chua | 2023-06-06 |
| 11587766 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, Kenneth S. Collins, Shahid Rauf +3 more | 2023-02-21 |
| 11564292 | Monolithic modular microwave source with integrated temperature control | Richard Fovell, Larry D. Elizaga, Silverst Rodrigues, Thai Cheng Chua, Philip Allan Kraus | 2023-01-24 |