Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11587766 | Symmetric VHF source for a plasma reactor | Kartik Ramaswamy, Igor Markovsky, Zhigang Chen, James D. Carducci, Kenneth S. Collins +3 more | 2023-02-21 |
| 11551965 | Apparatus to reduce polymers deposition | Andrew Nguyen, Xue Yang Chang, Jason A. Kenney | 2023-01-10 |