Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817312 | Delayed pulsing for plasma processing of wafers | Akhil Mehrotra, Vinay Shankar Vidyarthi, Daksh Agarwal, SAMANEH SADIGHI, Rajinder Dhindsa | 2023-11-14 |
| 11551965 | Apparatus to reduce polymers deposition | Andrew Nguyen, Xue Yang Chang, Shahid Rauf | 2023-01-10 |