Issued Patents 2023
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848176 | Plasma processing using pulsed-voltage and radio-frequency power | Leonid Dorf, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +3 more | 2023-12-19 |
| 11817312 | Delayed pulsing for plasma processing of wafers | Akhil Mehrotra, Vinay Shankar Vidyarthi, Daksh Agarwal, SAMANEH SADIGHI, Jason A. Kenney | 2023-11-14 |
| 11810768 | Temperature and bias control of edge ring | James Rogers, Linying Cui | 2023-11-07 |
| 11791140 | Confinement ring for use in a plasma processing system | Akira Koshiishi, Alexei Marakhatanov | 2023-10-17 |
| 11776789 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, James Rogers, Daniel Sang Byun, Evgeny Kamenetskiy, Yue Guo +4 more | 2023-10-03 |
| 11728124 | Creating ion energy distribution functions (IEDF) | Leonid Dorf, Travis Koh, Olivier Luere, Olivier Joubert, Philip Allan Kraus +1 more | 2023-08-15 |
| 11699572 | Feedback loop for controlling a pulsed voltage waveform | Leonid Dorf, Evgeny Kamenetskiy, James Rogers, Olivier Luere, Viacheslav Plotnikov | 2023-07-11 |
| 11670486 | Pulsed plasma chamber in dual chamber configuration | Alexei Marakhtanov, Eric A. Hudson, Andrew D. Bailey, III | 2023-06-06 |
| 11668553 | Apparatus and method for controlling edge ring variation | Sathyendra Ghantasala, Leonid Dorf, Evgeny Kamenetskiy, Peter Muraoka, Denis M. Koosau +1 more | 2023-06-06 |
| 11666952 | Condition selectable backside gas | Stephen Prouty, Martin Perez-Guzman, Sumanth Banda, Alvaro Garcia de Gorordo | 2023-06-06 |
| 11594400 | Multi zone gas injection upper electrode system | Ryan Bise, Alexei Marakhtanov, Lumin Li, Sang Ki Nam, Jim Rogers +6 more | 2023-02-28 |
| 11551916 | Sheath and temperature control of a process kit in a substrate processing chamber | Jaeyong Cho, James Rogers, Anwar Husain | 2023-01-10 |