Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848176 | Plasma processing using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Yue Guo +3 more | 2023-12-19 |
| 11776789 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Daniel Sang Byun, Yue Guo +4 more | 2023-10-03 |
| 11699572 | Feedback loop for controlling a pulsed voltage waveform | Leonid Dorf, James Rogers, Olivier Luere, Rajinder Dhindsa, Viacheslav Plotnikov | 2023-07-11 |
| 11668553 | Apparatus and method for controlling edge ring variation | Sathyendra Ghantasala, Leonid Dorf, Peter Muraoka, Denis M. Koosau, Rajinder Dhindsa +1 more | 2023-06-06 |