Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11848176 | Plasma processing using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Evgeny Kamenetskiy, Yue Guo +3 more | 2023-12-19 |
| 11776789 | Plasma processing assembly using pulsed-voltage and radio-frequency power | Leonid Dorf, Rajinder Dhindsa, James Rogers, Evgeny Kamenetskiy, Yue Guo +4 more | 2023-10-03 |
| 11764041 | Adjustable thermal break in a substrate support | Alvaro Garcia de Gorordo, Andreas Schmid, Stephen Prouty, Andrew Antoine NOUJAIM | 2023-09-19 |