Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764041 | Adjustable thermal break in a substrate support | Alvaro Garcia de Gorordo, Daniel Sang Byun, Andreas Schmid, Andrew Antoine NOUJAIM | 2023-09-19 |
| 11666952 | Condition selectable backside gas | Martin Perez-Guzman, Sumanth Banda, Rajinder Dhindsa, Alvaro Garcia de Gorordo | 2023-06-06 |
| 11651987 | Substrate support carrier with improved bond layer protection | Andreas Schmid, Jonathan Simmons, Sumanth Banda | 2023-05-16 |
| 11646183 | Substrate support assembly with arc resistant coolant conduit | Alvaro Garcia de Gorordo, Andreas Schmid, Andrew Antoine NOUJAIM | 2023-05-09 |
| 11569114 | Semiconductor processing with cooled electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Andreas Schmid, Andrew Antoine NOUJAIM | 2023-01-31 |