Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728143 | Process kit with adjustable tuning ring for edge uniformity control | — | 2023-08-15 |
| 11569114 | Semiconductor processing with cooled electrostatic chuck | Steven E. Babayan, Andreas Schmid, Stephen Prouty, Andrew Antoine NOUJAIM | 2023-01-31 |