Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842917 | Process kit ring adaptor | Leon Volfovski, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan, Douglas R. McAllister +3 more | 2023-12-12 |
| 11823937 | Calibration of an aligner station of a processing system | Nicholas Michael Bergantz, Leon Volfovski, Sanggyum Kim, Damon K. Cox, Paul Z. Wirth | 2023-11-21 |
| 11764041 | Adjustable thermal break in a substrate support | Alvaro Garcia de Gorordo, Daniel Sang Byun, Stephen Prouty, Andrew Antoine NOUJAIM | 2023-09-19 |
| 11721569 | Method and apparatus for determining a position of a ring within a process kit | Andrew Myles, Phillip Criminale, Steven E. Babayan | 2023-08-08 |
| 11668553 | Apparatus and method for controlling edge ring variation | Sathyendra Ghantasala, Leonid Dorf, Evgeny Kamenetskiy, Peter Muraoka, Denis M. Koosau +1 more | 2023-06-06 |
| 11651987 | Substrate support carrier with improved bond layer protection | Stephen Prouty, Jonathan Simmons, Sumanth Banda | 2023-05-16 |
| 11646183 | Substrate support assembly with arc resistant coolant conduit | Stephen Prouty, Alvaro Garcia de Gorordo, Andrew Antoine NOUJAIM | 2023-05-09 |
| 11585895 | Detection of parking slot configuration based on repetitive patterns | Christopher Unverdorben, Christian Pfaffenzeller | 2023-02-21 |
| 11569114 | Semiconductor processing with cooled electrostatic chuck | Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Andrew Antoine NOUJAIM | 2023-01-31 |