| 11842917 |
Process kit ring adaptor |
Leon Volfovski, Denis M. Koosau, Nicholas Michael Kopec, Steven E. Babayan, Douglas R. McAllister +3 more |
2023-12-12 |
| 11823937 |
Calibration of an aligner station of a processing system |
Nicholas Michael Bergantz, Leon Volfovski, Sanggyum Kim, Damon K. Cox, Paul Z. Wirth |
2023-11-21 |
| 11764041 |
Adjustable thermal break in a substrate support |
Alvaro Garcia de Gorordo, Daniel Sang Byun, Stephen Prouty, Andrew Antoine NOUJAIM |
2023-09-19 |
| 11721569 |
Method and apparatus for determining a position of a ring within a process kit |
Andrew Myles, Phillip Criminale, Steven E. Babayan |
2023-08-08 |
| 11668553 |
Apparatus and method for controlling edge ring variation |
Sathyendra Ghantasala, Leonid Dorf, Evgeny Kamenetskiy, Peter Muraoka, Denis M. Koosau +1 more |
2023-06-06 |
| 11651987 |
Substrate support carrier with improved bond layer protection |
Stephen Prouty, Jonathan Simmons, Sumanth Banda |
2023-05-16 |
| 11646183 |
Substrate support assembly with arc resistant coolant conduit |
Stephen Prouty, Alvaro Garcia de Gorordo, Andrew Antoine NOUJAIM |
2023-05-09 |
| 11585895 |
Detection of parking slot configuration based on repetitive patterns |
Christopher Unverdorben, Christian Pfaffenzeller |
2023-02-21 |
| 11569114 |
Semiconductor processing with cooled electrostatic chuck |
Yogananda Sarode Vishwanath, Steven E. Babayan, Stephen Prouty, Andrew Antoine NOUJAIM |
2023-01-31 |
