Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837479 | Advanced temperature control for wafer carrier in plasma processing chamber | Fernando Silveira, Chunlei Zhang, Jaeyong Cho | 2023-12-05 |
| 11817724 | Enclosure system with charging assembly | Zhiqiang Guo, Andrew S. C. Ho, Rachel Sara Stolzman, Michael Carl Hankes | 2023-11-14 |
| 11721569 | Method and apparatus for determining a position of a ring within a process kit | Andrew Myles, Andreas Schmid, Steven E. Babayan | 2023-08-08 |
| 11622419 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Steven E. Babayan, David Ullstrom | 2023-04-04 |
| 11615973 | Substrate carrier using a proportional thermal fluid delivery system | Justin Phi, Dan Marohl, Sergio Fukuda Shoji, Brad L. Mays | 2023-03-28 |
| 11589474 | Diagnostic disc with a high vacuum and temperature tolerant power source | Zhiqiang Guo, Philip Allan Kraus, Andrew Myles, Martin Perez-Guzman | 2023-02-21 |