Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11622419 | Azimuthally tunable multi-zone electrostatic chuck | Chunlei Zhang, Phillip Criminale, Steven E. Babayan | 2023-04-04 |
DU
David Ullstrom
Overall (2023): #468,049 of 537,848Top 90%
1
Patents 2023