Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837479 | Advanced temperature control for wafer carrier in plasma processing chamber | Fernando Silveira, Chunlei Zhang, Phillip Criminale | 2023-12-05 |
| 11551916 | Sheath and temperature control of a process kit in a substrate processing chamber | Rajinder Dhindsa, James Rogers, Anwar Husain | 2023-01-10 |