Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11551916 | Sheath and temperature control of a process kit in a substrate processing chamber | Jaeyong Cho, Rajinder Dhindsa, James Rogers | 2023-01-10 |
| 11551960 | Helical plug for reduction or prevention of arcing in a substrate support | Reyn Tetsuro WAKABAYASHI, Hamid Noorbakhsh | 2023-01-10 |
| 11543954 | Scroll activity detection for selection and display of information | — | 2023-01-03 |