Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837479 | Advanced temperature control for wafer carrier in plasma processing chamber | Chunlei Zhang, Phillip Criminale, Jaeyong Cho | 2023-12-05 |
FS
Fernando Silveira
Overall (2023): #447,651 of 537,848Top 85%
1
Patents 2023