Issued Patents 2023
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837478 | Temperature-controllable process chambers, electronic device processing systems, and manufacturing methods | — | 2023-12-05 |
| 11830760 | Servo-control system | Behzad Taheri | 2023-11-28 |
| 11823937 | Calibration of an aligner station of a processing system | Nicholas Michael Bergantz, Andreas Schmid, Leon Volfovski, Sanggyum Kim, Damon K. Cox | 2023-11-21 |
| 11813757 | Centerfinding for a process kit or process kit carrier at a manufacturing system | Ali Utku Pehlivan, Mohsin Waqar, Todd James Brill | 2023-11-14 |
| 11798833 | Methods of use of a servo control system | Behzad Taheri | 2023-10-24 |
| 11791172 | Methods of controlling gas pressure in gas-pulsing-based precursor distribution systems | Mauro Cimino, Arkaprava Dan | 2023-10-17 |
| 11772958 | Mass flow control based on micro-electromechanical devices | Nir Merry, Ming Xu, Sushant S. Koshti, Raechel Chu-Hui Tan | 2023-10-03 |
| 11590662 | Robot for simultaneous substrate transfer | Charles T. Carlson, Jason M. Schaller | 2023-02-28 |
| 11582378 | Methods and apparatus for absolute and relative depth measurements using camera focus distance | Ozkan Celik, Patricia A. Schulze, Gregory John Freeman, Tommaso Vercesi | 2023-02-14 |
| 11551951 | Methods and systems for temperature control for a substrate | Kiyki-Shiy Shang, Mikhail Taraboukhine | 2023-01-10 |