Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772958 | Mass flow control based on micro-electromechanical devices | Paul Z. Wirth, Ming Xu, Sushant S. Koshti, Raechel Chu-Hui Tan | 2023-10-03 |
| 11749537 | Side storage pods, equipment front end modules, and methods for operating equipment front end modules | Patrick D. Pannese, Murali Narasimhan, Paul B. Reuter | 2023-09-05 |
| 11749540 | Dual actuating tilting slit valve | Jeff Hudgens | 2023-09-05 |
| 11640915 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Paul B. Reuter, Dean C. Hruzek, John C. Menk, Douglas B. Baumgarten | 2023-05-02 |
| 11610794 | Side storage pods, equipment front end modules, and methods for operating the same | Paul B. Reuter, Dean C. Hruzek, John C. Menk, Douglas B. Baumgarten | 2023-03-21 |