Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772958 | Mass flow control based on micro-electromechanical devices | Nir Merry, Paul Z. Wirth, Ming Xu, Raechel Chu-Hui Tan | 2023-10-03 |
| 11581203 | Systems for integrating load locks into a factory interface footprint space | Jacob Newman, Andrew J. Constant, Michael R. Rice, Paul B. Reuter, Shay Assaf | 2023-02-14 |