Issued Patents 2023
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11842913 | Seal mechanisms for load ports | Douglas B. Baumgarten, James Christopher Hansen | 2023-12-12 |
| 11810805 | Prevention of contamination of substrates during gas purging | Douglas B. Baumgarten, Russell Kaplan, Amitabh Puri | 2023-11-07 |
| 11791185 | Side storage pods, electronic device processing systems, and methods for operating the same | Dean C. Hruzek | 2023-10-17 |
| 11749537 | Side storage pods, equipment front end modules, and methods for operating equipment front end modules | Patrick D. Pannese, Murali Narasimhan, Nir Merry | 2023-09-05 |
| 11640915 | Side storage pods, equipment front end modules, and methods for operating EFEMs | Dean C. Hruzek, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2023-05-02 |
| 11637029 | Load port operation in electronic device manufacturing apparatus, systems, and methods | — | 2023-04-25 |
| 11610794 | Side storage pods, equipment front end modules, and methods for operating the same | Dean C. Hruzek, Nir Merry, John C. Menk, Douglas B. Baumgarten | 2023-03-21 |
| 11581203 | Systems for integrating load locks into a factory interface footprint space | Jacob Newman, Andrew J. Constant, Michael R. Rice, Shay Assaf, Sushant S. Koshti | 2023-02-14 |
| 11574831 | Method and apparatus for substrate transfer and radical confinement | Jared Ahmad Lee, Martin Jeffrey Salinas, Imad Yousif, Aniruddha Pal | 2023-02-07 |