Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823933 | Indexable side storage pod apparatus, heated side storage pod apparatus, systems, and methods | — | 2023-11-21 |
| 11749537 | Side storage pods, equipment front end modules, and methods for operating equipment front end modules | Murali Narasimhan, Paul B. Reuter, Nir Merry | 2023-09-05 |
| 11569102 | Oxidation inhibiting gas in a manufacturing system | Murali Narasimhan, Kunal Jain | 2023-01-31 |