Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11773479 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Biraja P. Kanungo, Jennifer Y. Sun, Martin Jeff Salinas | 2023-10-03 |
| 11776793 | Plasma source with ceramic electrode plate | Robert B. Moore, Marc Shull, Tsutomu Tanaka, Alexander V. Garachtchenko, Dmitry A. Dzilno | 2023-10-03 |
| 11705312 | Vertically adjustable plasma source | Tsutomu Tanaka, Rakesh Ramadas, Dmitry A. Dzilno, Gregory J. Wilson, Sriharish Srinivasan | 2023-07-18 |
| 11583816 | Gas distribution plate for thermal deposition | Sanjeev Baluja, Joseph AuBuchon, Dhritiman Subha Kashyap, Michael R. Rice | 2023-02-21 |
| 11584993 | Thermally uniform deposition station | Sanjeev Baluja, Joseph AuBuchon, Kenneth Brian Doering, Dhritiman Subha Kashyap, Kartik Shah | 2023-02-21 |
| 11574831 | Method and apparatus for substrate transfer and radical confinement | Martin Jeffrey Salinas, Paul B. Reuter, Imad Yousif, Aniruddha Pal | 2023-02-07 |