Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823871 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Jozef Kudela, Alexander V. Garachtchenko, Dmitry A. Dzilno, Avinash Shervegar, Kallol Bera +3 more | 2023-11-21 |
| 11776793 | Plasma source with ceramic electrode plate | Robert B. Moore, Jared Ahmad Lee, Marc Shull, Alexander V. Garachtchenko, Dmitry A. Dzilno | 2023-10-03 |
| 11705312 | Vertically adjustable plasma source | Jared Ahmad Lee, Rakesh Ramadas, Dmitry A. Dzilno, Gregory J. Wilson, Sriharish Srinivasan | 2023-07-18 |
| 11699571 | Semiconductor processing chambers for deposition and etch | Khokan Chandra Paul, Ravikumar Patil, Vijet Patil, Carlaton WONG, Adam J. Fischbach +2 more | 2023-07-11 |