Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823871 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Jozef Kudela, Tsutomu Tanaka, Alexander V. Garachtchenko, Dmitry A. Dzilno, Avinash Shervegar +3 more | 2023-11-21 |
| 11810810 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Joseph Yudovsky | 2023-11-07 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Jennifer Y. Sun, Philip Allan Kraus +6 more | 2023-02-14 |
| 11557501 | Contour pocket and hybrid susceptor for wafer uniformity | Kaushal Gangakhedkar, Joseph Yudovsky | 2023-01-17 |