Issued Patents 2023
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837448 | High-temperature chamber and chamber component cleaning and maintenance method and apparatus | Shuran Sheng, Lin Zhang, Jiyong Huang, Jang Seok OH, Joseph C. Werner +4 more | 2023-12-05 |
| 11773479 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Biraja P. Kanungo, Martin Jeff Salinas, Jared Ahmad Lee | 2023-10-03 |
| 11731907 | Ceramic material with high thermal shock resistance and high erosion resistance | Ren-Guan Duan | 2023-08-22 |
| 11724353 | Chamber components with polished internal apertures | Vahid Firouzdor, David Koonce, Biraja P. Kanungo | 2023-08-15 |
| 11702744 | Metal oxyfluoride film formation methods | Nitin Deepak, Gayatri Natu, Albert Barrett Hicks, III, Prerna Goradia | 2023-07-18 |
| 11680308 | Plasma erosion resistant rare-earth oxide based thin film coatings | Biraja P. Kanungo, Vahid Firouzdor, Tom K. Cho | 2023-06-20 |
| 11667577 | Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments | David Fenwick | 2023-06-06 |
| 11667578 | Methods of making nanopowders, nanoceramic materials and nanoceramic components | Guodong Zhan, Xiaowei Wu, Xiao-Ming He | 2023-06-06 |
| 11667575 | Erosion resistant metal oxide coatings | Xiaowei Wu, Michael R. Rice | 2023-06-06 |
| 11658014 | Apparatuses and methods of protecting nickel and nickel containing components with thin films | Pingyan Lei, Dien-Yeh Wu, Xiao-Ming He, Lei Zhou, Takashi Kuratomi +3 more | 2023-05-23 |
| 11639547 | Halogen resistant coatings and methods of making and using thereof | Prerna Goradia, Xiaowei Wu, Geetika Bajaj, Atul Bhaskar Chaudhari, Ankur Kadam | 2023-05-02 |
| 11587771 | Chemistry compatible coating material for advanced device on-wafer particle performance | Biraja P. Kanungo, Dmitry Lubomirsky | 2023-02-21 |
| 11581206 | Capacitive sensor for chamber condition monitoring | Yaoling Pan, Patrick Tae, Leonard Tedeschi, Philip Allan Kraus, Xiaopu Li +6 more | 2023-02-14 |
| 11578398 | Plasma spray coating design using phase and stress control | Yikai Chen, Biraja P. Kanungo | 2023-02-14 |
| 11572617 | Protective metal oxy-fluoride coatings | David Fenwick, Chengtsin Lee, Yikai Chen | 2023-02-07 |
| 11566318 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566319 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11566317 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Vahid Firouzdor, Biraja P. Kanungo, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2023-01-31 |
| 11562890 | Corrosion resistant ground shield of processing chamber | Dmitry Lubomirsky, Xiao-Ming He, Xiaowei Wu, Laksheswar Kalita, Soonam Park | 2023-01-24 |
| 11547030 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, David Fenwick +6 more | 2023-01-03 |