Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702744 | Metal oxyfluoride film formation methods | Nitin Deepak, Albert Barrett Hicks, III, Prerna Goradia, Jennifer Y. Sun | 2023-07-18 |
| 11547030 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Geetika Bajaj, Prerna Goradia, Darshan Thakare, David Fenwick, Xiaoming He +6 more | 2023-01-03 |