Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11639547 | Halogen resistant coatings and methods of making and using thereof | Prerna Goradia, Jennifer Y. Sun, Xiaowei Wu, Atul Bhaskar Chaudhari, Ankur Kadam | 2023-05-02 |
| 11547030 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Prerna Goradia, Darshan Thakare, David Fenwick, Xiaoming He +6 more | 2023-01-03 |