Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11547030 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, David Fenwick, Xiaoming He +6 more | 2023-01-03 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11547030 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, David Fenwick, Xiaoming He +6 more | 2023-01-03 |