Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11667577 | Y2O3—ZrO2 erosion resistant material for chamber components in plasma environments | Jennifer Y. Sun | 2023-06-06 |
| 11572617 | Protective metal oxy-fluoride coatings | Chengtsin Lee, Jennifer Y. Sun, Yikai Chen | 2023-02-07 |
| 11547030 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, Xiaoming He +6 more | 2023-01-03 |