Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834744 | Ceramic showerheads with conductive electrodes | Soonam Park, Dmitry Lubomirsky, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2023-12-05 |
| 11715625 | Semiconductor processing chamber | Greg Toland, Kenneth D. Schatz, Dmitry Lubomirsky | 2023-08-01 |
| 11591693 | Ceramic showerheads with conductive electrodes | Soonam Park, Dmitry Lubomirsky, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2023-02-28 |
| 11562890 | Corrosion resistant ground shield of processing chamber | Dmitry Lubomirsky, Xiao-Ming He, Jennifer Y. Sun, Xiaowei Wu, Soonam Park | 2023-01-24 |
| 11557464 | Semiconductor chamber coatings and processes | Son T. Nguyen, Dmitry Lubomirsky, Kenneth D. Schatz | 2023-01-17 |