| 11834744 |
Ceramic showerheads with conductive electrodes |
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2023-12-05 |
| 11735441 |
Systems and methods for improved semiconductor etching and component protection |
Tien Fak Tan, Lok Kee Loh, Dmitry Lubomirsky, Soonwook Jung, Martin Yue Choy |
2023-08-22 |
| 11728139 |
Process chamber for cyclic and selective material removal and etching |
Toan Q. Tran, Junghoon Kim, Dmitry Lubomirsky |
2023-08-15 |
| 11591693 |
Ceramic showerheads with conductive electrodes |
Laksheswar Kalita, Dmitry Lubomirsky, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more |
2023-02-28 |
| 11594428 |
Low temperature chuck for plasma processing systems |
Toan Q. Tran, Zilu Weng, Dmitry Lubomirsky, Satoru Kobayashi, Tae Seung Cho +2 more |
2023-02-28 |
| 11562890 |
Corrosion resistant ground shield of processing chamber |
Dmitry Lubomirsky, Xiao-Ming He, Jennifer Y. Sun, Xiaowei Wu, Laksheswar Kalita |
2023-01-24 |
